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Revolutionize Your Lab’s Thin-Film Research with the Royal RTAC950-SP Multi-Process Sputtering Coating System

Revolutionize Your Lab’s Thin-Film Research with the Royal RTAC950-SP Multi-Process Sputtering Coating System

2025-12-28

In the dynamic world of materials science, optics, and surface engineering, having versatile and reliable laboratory equipment is not just an advantage—it’s a necessity. For research teams exploring advanced coatings—from ultra-hard DLC films to high-reflectivity optical layers—the challenge often lies in finding a single deposition system that offers both flexibility and precision. Enter the Royal RTAC950-SP, a state-of-the-art multifunction vacuum coating machine designed specifically for R&D, integrating medium-frequency/direct current sputtering cathodes and a linear ion source to unlock unprecedented experimental possibilities.

Why Choose a Modular, Multi-Process System for Your Lab?

Traditional single-process coaters can limit innovation, forcing researchers to adapt their projects to the equipment's capabilities rather than the other way around. The Royal RTAC950-SP shatters these constraints with its modular “plug-and-play" architecture. Its standardized mounting flanges allow for the quick and easy interchange of Gencoa magnetron sputtering cathodes, arc evaporation sources, and linear ion source assemblies. This means your laboratory can seamlessly switch between PVD hard coatings, PECVD processes, DLC/diamond-like carbon films, and sputtered optical coatings without investing in multiple dedicated machines. It’s the ultimate tool for comparative studies and developing next-generation multilayer or composite films.

Engineered for Performance and Simplicity

At its core, the RTAC950-SP is built to deliver robust, repeatable results under rigorous research conditions.

  • Superior Vacuum Foundation: Achieving a base pressure of ≤ 3.0*10⁻² Pa and an ultimate vacuum better than 8.0*10⁻⁴ Pa, the system ensures a clean, contaminant-free environment essential for high-purity film growth. The rapid pump-down cycle (≤15 minutes to 1.0*10⁻³ Pa) maximizes productive lab time.
  • Precision Process Control: Equipped with a PLC + Touch Screen automation system (featuring Mitsubishi PLC and Schneider/Omron components), the coater offers full-auto, semi-auto, and manual operational modes. Its recipe management system automatically logs all critical parameters—target current/voltage, mass flow, pressure, temperature, and coating time—for detailed analysis and perfect process replication.
  • Robust Deposition Capabilities: Whether you’re sputtering from ITO, Ti, Cr, Al, or alloy targets like TiAl, or utilizing arc cathodes for dense metallic films, the system provides stable, controlled deposition. The integrated linear ion source is a game-changer, enabling ion-assisted deposition (IAD) for denser, more adherent coatings and facilitating advanced PA PVD and PECVD processes.
  • User-Centric Design: The dual-door (front and rear) chamber design, crafted from SUS304 stainless steel, offers exceptional accessibility for sample loading, fixture changes, and maintenance. Comprehensive safety interlock systems protect both the operator and the equipment.
Key Specifications at a Glance
  • Chamber Internal Dimensions: Ø950mm (D) x 1350mm (H)
  • Heating: Sample heating up to 500°C
  • Power Supplies: Integrated MF/DC sputtering, DC arc, and bias power supplies.
  • Monitoring: Full-range vacuum gauges, thermocouples, and 4-channel MFCs for precise gas control.
  • Footprint: Approximately 4400 x 3200 x 2950 mm, designed for efficient lab space utilization.
Broad Applications for Cutting-Edge Research

The RTAC950-SP is the ideal laboratory thin-film deposition system for a wide spectrum of applications:

  • Functional & Protective Coatings: Develop wear-resistant, corrosion-resistant hard coatings for tools and components. Engineer solid lubricant or decorative coatings in colors like black, rose gold, or blue.
  • Optical & Semiconductor Films: Deposit high-reflectivity, anti-reflective, or conductive transparent optical thin films.
  • Advanced Carbon Films: Research and optimize the properties of DLC and diamond-like carbon films for biomedical, automotive, or tribological applications.
  • Fundamental R&D: Its flexibility makes it perfect for prototyping new coating architectures, studying film growth mechanisms, and testing novel material combinations.
The Royal Advantage: More Than Just a Machine

Choosing Royal means partnering with a dedicated solution provider. We offer:

  • Comprehensive Support: From machine operation and maintenance to in-depth training on coating process recipes and programming.
  • Global Service Network: With support centers in Europe (Poland), the Middle East (Iran, Turkey), India, and South America (Mexico).
  • Warranty & Customization: Backed by a 1-year free limited warranty and a lifetime machine warranty. We also provide OEM & ODM services for custom-designed solutions.
  • Worldwide Delivery: Packed to export standards for safe long-distance sea/air freight.
Empower Your Research Today

Don’t let equipment limitations define the scope of your research. The Royal RTAC950-SP multifunction R&D coating system is more than a laboratory sputtering coater—it’s a scalable research platform designed to evolve with your projects.

Ready to transform your thin-film research capabilities? Contact Royal Technology now to discuss your specific needs, request a detailed quotation, and discover how our comprehensive coating solutions can accelerate your path to discovery. Let's build the future of surface engineering, together.